News | October 5, 2001

Lambda Physik Ships the First Commercially Available 180 W KrF Industrial Excimer Laser - Lambda STEEL 600K

Source: Lambda Physik USA, Inc.

Lambda Physik shipped the first commercially available 180Wat KrF industrial Excimer laser. The Lambda STEEL ( STable Energy Excimer Laser) series is designed for high throughput and high duty-cycle industrial production. Excellent pulse energy stability makes this excimer laser ideal for high throughput microstructuring. Lambda STEEL 600K delivers high power, 180 W, stabilized output energy of 600mJ at 300Hz. With a pulse duration of about 20ns an output power of 30 Megawatts can be achieved. In order to meet high production demands of the marketplace, maintenance time is minimized by the complete modular structure of the laser. Lambda STEEL lasers feature outstanding gas, optical components and tube lifetimes that have been proven by performance. STEEL 600K offers an improved Fluorine optimised NovaTube® for extended system availability and low running costs, and employs new beam shielding and mirror mounts for ease of use.

The STEEL 600K belongs to the proven Lambda STEEL industrial excimer laser series. Other STEEL models include the STEEL 670, a 200 W XeCl excimer laser, and the STEEL 1000, a 300 W XeCl excimer laser. The possible applications for Lambda STEEL series are numerous; reaching from the field of material processing by microstructuring to microdrilling, with a resolution of a few mm obtainable by common mask techniques, to manipulating surface or material properties, e.g. hardening, passivation or recrystallization. Recrystallization is the most prominent example for applications using Lambda STEEL, namely Excimer Laser Annealing (ELA) for low temperature poly silicon TFT LCD Flat Panel Display production.

The Lambda STEEL lasers have already successfully been assigned to production lines for the production of TFT-LCD displays and based on performance, exemplify high reliability and extraordinary stable beam parameters.

Lambda Physik AG (German Neuer Markt: LPX) is a worldwide manufacturer of high-power, pulsed-UV and tunable laser sources for lithographic, industrial, scientific and medical applications.

For more information, contact Lynn Kobel-Haddad, Marketing Communications Manager, Lambda Physik Inc., 3201 West Commercial Boulevard, Fort Lauderdale, FL 33309, Phone: (954) 486-1500, Fax: (954) 486-1501, Email: marcom@lambdaphysik.com, Web site: www.lambdaphysik.com

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act The statements in this press release that relate to future plans, events or performance are forward-looking statements that involve risks and uncertainties, including risks associated with uncertainties related to contract cancellations, manufacturing risks, competitive factors, uncertainties pertaining to customer orders, demand for products and services, development of markets for the Company's products and services and other risks identified in the Company's SEC filings. Actual results, events and performance may differ materially. Readers are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date hereof. The Company undertakes no obligation to release publicly the result of any revisions to these forward-looking statements that may be made to reflect events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.

Lambda Physik USA, Inc., 3201 West Commercial Boulevard, Suite 110, Ft. Lauderdale, FL 33309. Tel: 954-486-1500; Fax: 954-486-1501.