Lambda Physik Ships First NovaLine Excimer Lasers For High NA 193 nm Step & Scan Tools
The new NovaLine A2005 laser provides the lowest specified bandwidth of less than 0.35 pm, FWHM. The extremely narrow bandwidth greatly reduces chromatic aberrations, which would normally be corrected by additional lens elements. The spectral performance of the laser optimizes the image contrast of refractive lenses with very high NA. With 2 kHz repetition rate and 10 W output power, NovaLine lasers enable increased scan speeds and maximized throughput.
A newly designed line-narrowing module improves spectral performance. The line-narrowing module gives higher transmission while improving the spectral characteristics of the laser. In addition, the laser utilizes an improved discharge unit. This new laser discharge unit provides higher discharge stability leading to better dose energy stability and extended component lifetimes. As a result, the overall laser efficiency is improved and the maintenance intervals are increased substantially.
Based on technology leadership and an uncompromised commitment to the lithography market, Lambda Physik has become a major supplier of excimer lasers for 193 nm lithography. Multiple follow on orders for the A2005 have already been received and production has increased to meet further demands in 2001. The A2005 is an important step towards introduction of 193 nm technology on the production floor that demands higher image contrast and higher throughput at reduced cost of operation.
Lambda Physik is a worldwide manufacturer of high power, pulsed UV and tunable laser sources for lithographic, industrial, scientific and medical applications.