Lambda Physik Receives Follow on Orders for High Performance Excimer Laser Systems From SVG Lithography Systems, Inc.
Phone: 954-486-1500
Ft. Lauderdale, FL, April 14, 1999--<%=company%> today announced multiple orders for their high performance excimer laser systems from Silicon Valley Group. The order is for the next generation NovaLine excimer laser systems operating at 2 kHz pulse rate and will be delivered in the second calendar quarter of 1999. SVG-Lithography will take delivery of several A2020 (2kHz ArF) lasers for integration with high throughput production versions of its MICRASCAN III and MS193 nm systems.
"The advanced performance specifications of these next generation lasers are key to providing high productivity, leading edge lithographic technology to our customers," said Bill Hightower, president SVG.
NovaLine K2020 is a 30 W (15 mJ/pulse) partially line-narrowed 248 nm (KrF) laser for use with SVG's catadioptric lens design. The K2020 provides superior pulse stability (± 0.5%) while delivering 15 mJ/pulse at 2000 Hz. With continued improvements in key modules such as the NovaTube (5 billion pulse lifetime) and the NovaPowerSwitch solid-state switch (lifetime warranty), the K2020 has reduced the cost per pulse by a factor of two while providing greater throughput, thus enabling a substantial Cost of Ownership (CoO) improvement.
NovaLine A2020 is a 20 W (10 mJ/pulse) partially line-narrowed 193 nm (ArF) laser designed specifically for SVG's MICRASCAN 193 nm production systems. Due to careful selection of optical and laser tube materials, the A2020 is extremely efficient enabling the longest component lifetimes and the lowest Cost of Ownership available today. High output power, tight pulse stability and low operating cost contribute positively to the goal of bringing 193 nm lithography into the mainstream production line.
<%=company%> is a worldwide manufacturer of high power, pulsed UV and tunable laser sources for scientific, medical, lithography and other industrial applications.
Silicon Valley Group is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry.
For more information, contact Lynn Kobel, Marketing Communications Manager, <%=company%> Inc., 3201 West Commercial Blvd., Fort Lauderdale, FL 33309, (954)486-1500, Fax (954)486-1501, www.lambdaphysik.com, e-mail: marcom@lambdaphysik.com.