Lambda Physik Receives $11M Order for TFT Annealing System Components from Japan Steel Works

Lambda Physik USA, Inc., Fort Lauderdale, FL—Japan Steel Works (JSW) has placed multiple orders totaling more than $11 million with <%=company%> (www.lambdaphysik.com) and MicroLas Lasersystem GmbH (www.microlas.de). The high performance, high power, industrial excimer lasers and line beam optics will be integrated into JSW's (www.jsw.co.jp) TFT annealing systems. The Systems use excimer laser radiation for the polycrystallization of amorphous silicone thin film on substrates. JSW has pioneered this technology for the mass production of polysilicon TFT liquid crystal display panels that are integrated into various consumer media products, such as laptop computers, car navigation displays, video recorders, cameras, TV's, etc.

The multiple laser order includes delivery of the new Lambda STEEL (STable Energy Excimer Laser) series, specifically optimized for TFT annealing systems. Lambda STEEL's high pulse energy (up to 1000 mJ) combined with a high repetition rate (300 Hz), are key specifications required for the mass production of the next generation of large-area Flat Panel Displays.

The Lambda STEEL XeCl excimer laser delivers up to 300 W (1000 mJ per pulse) at 308 nm and provides superior peak-to peak pulse stability and exceptional reliability. These specifications were achieved by redesigning the laser tube, enabling higher gas and tube lifetimes. Optimized and carefully selected mechanical and optical components ensure a higher component lifetime, and thus a lower cost of ownership. The high-energy laser ensures the necessary energy density for the annealing process with newly designed 365 mm line beam (LB-365) optics from MicroLas. First shipments will start in July 2000.

Lambda Physik is a worldwide manufacturer of high power, pulsed UV and tunable laser sources for industrial, scientific, medical, and lithography applications.

Japan Steel Works (JSW) has a worldwide reputation as a leading integrator/manufacturer of steels and machinery. JSW has grown into a materials-mechatronics enterprise that develops cutting-edge technologies to meet the demand of high-tech industries.

MicroLas Lasersystem GmbH is a joint venture company of Lambda Physik and Jenoptik. MicroLas develops and manufactures UV optics for excimer laser-based applications.