Lambda Physik Introduces Lambda STEEL - The New Generation of Industrial Excimer Lasers
Source: Lambda Physik USA, Inc.
June 1, 2000, Fort Lauderdale, FL - Lambda Physik USA, Inc. has introduced the first commercially available 300 W XeCl industrial excimer laser—the new Lambda STEEL (STable Energy Excimer Laser) series. Generating up to 1000 mJ / 300 W / 300 Hz at 308 nm (XeCl), the Lambda STEEL lasers are designed for high throughput and high duty-cycle industrial production. An excellent pulse energy stability specification makes these lasers ideal for large area processing applications such as TFT annealing or simultaneous drilling of ink jet nozzles.
The Lambda STEEL series offers increased pulse stability and reliability with a significant reduction in operating costs. This has been achieved by:
- redesigning the laser tube for outstanding gas lifetimes and pulse energy stability
- optimizing beam shielding and the beam shutter to increase the mechanical stability and optic lifetimes
- implementing a new laser tube adjustment device to minimize maintenance time
- designing a cleanroom-compatible stainless steel cabinet
The Lambda STEEL series is available in two models: Lambda STEEL 670 generates a stabilized pulse energy of 670 mJ at 300 Hz with 200 W power and the Lambda STEEL 1000 generates a stabilized pulse energy of 1000 mJ at 300 Hz and 300 W power.
Lambda Physik is a worldwide manufacturer of high power, pulsed UV and tunable laser sources for industrial, scientific, medical, and lithography applications.