Application Note

Application Note: Identification and Characterization Of The 3-Dimensional Vibration Behavior Of A MEMS Cantilever Structure

Source: Polytec
MEMS sensors find their use in wide fields of applications, among them aviation, automotive and data storage. Here we present the analysis of the complete dynamical behavior of a standard MEMS device in order to demonstrate the capabilities of the optical state-of-the-art measurement technology.

access the Application Note!

Get unlimited access to:
Trend and Thought Leadership Articles
Case Studies & White Papers
Extensive Product Database
Members-Only Premium Content
Welcome Back! Please Log In to Continue. X

Enter your credentials below to log in. Not yet a member of Photonics Online? Subscribe today.

Subscribe to Photonics Online X

Please enter your email address and create a password to access the full content, Or log in to your account to continue.

or

Subscribe to Photonics Online

Please tell us more about you so that we can customize our newsletters to your specific interests: