Application Note

Application Note: Identification and Characterization Of The 3-Dimensional Vibration Behavior Of A MEMS Cantilever Structure

Source: Polytec
MEMS sensors find their use in wide fields of applications, among them aviation, automotive and data storage. Here we present the analysis of the complete dynamical behavior of a standard MEMS device in order to demonstrate the capabilities of the optical state-of-the-art measurement technology.