From The Editor | August 28, 2025

How Metrology Drives Innovation In Chip Production

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By John Oncea, Editor

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Metrology is the science behind precise measurement, and its role in semiconductor manufacturing is increasingly vital as chips get smaller and more complex, powering our digital world.

Metrology is the science of measurement, forming the foundation for everything from trade to technology. Over centuries, writes UNESCO, metrology has evolved from establishing length standards to underpinning scientific progress in areas such as energy, health, communications, and now, industry.

In everyday life, metrology appears in activities as mundane as buying food, navigating with a GPS, and even crossing a bridge. Its precision ensures fairness in trade and technological advancement by enabling internationally recognized standard units. Today, national metrology institutes, such as the National Institute of Standards and Technology (NIST) in the United States, drive global collaboration and innovation through ongoing development of measurement science.

Metrology In Semiconductor Manufacturing

Semiconductors are the backbone of modern electronics, giving life to computers, mobile phones, and countless other digital devices. As electronic devices grow progressively smaller and more complex, metrology stands at the heart of semiconductor manufacturing.

Accurate measurement becomes pivotal not just for the physical dimensions of components, but for predicting, monitoring, and ensuring quality throughout every stage of production. Today’s industry faces daunting challenges: manufacturing processes must control features at the nanometer scale and align many multilayered structures with atomic precision. Yield issues, increased costs, and limits in quality are direct consequences when measurement tools fall short of industry needs.

NIST’s CHIPS Metrology Program targets these issues by leveraging innovative measurement science, advanced simulation, and collaborative standards development. Initiatives like the Metrology Exchange to Innovate in Semiconductors (METIS) promote data sharing and interdisciplinary collaboration, helping manufacturers overcome emerging technical barriers.

Through workshops, expert panels, and dedicated community practice, NIST is seeding innovations capable of addressing the seven grand metrology challenges – from materials purity and advanced packaging to simulation of manufacturing processes and real-time detection.

Historical Impacts And Techniques

The intricate relationship between metrology and semiconductor manufacturing began with the move to mass production of microelectronic components. Early on, bulk measurements sufficed as components were large enough for traditional instruments, writes the National Library of Medicine.

With the advent of microchips and the rise of Moore’s Law, which predicted the doubling of transistor count every two years, the demand for ever-greater precision drove the development of specialized metrology techniques, such as atomic force microscopy and electron beam inspection. These tools enabled visualization and measurement of features just nanometers wide, guiding process engineers in refining lithography, etching, and doping steps.

Current Uses In The Industry

Today, semiconductor manufacturing facilities utilize metrology across every step of production. Precise measurements define the geometry and electrical characteristics of microelectronic materials and their layered structures. These capabilities are essential not just for guaranteeing product quality but for providing feedback that allows processes to be adjusted and defects to be minimized.

NIST’s research includes developing models and simulations for manufacturing processes, linking laboratory measurements to full-scale industrial production. Collaborative efforts among academia, industry, and government agencies ensure that metrology keeps pace with the latest device architectures and manufacturing innovations.

As highlighted by the CHIPS Metrology Community, participation from engineers, researchers, and executives is driving progress in developing new instruments, methods, and standards that align with the highest priorities of the U.S. semiconductor industry. This wide-ranging collaboration is critical as manufacturers address challenges posed by shrinking device geometries and the introduction of advanced materials, such as two-dimensional semiconductors and heterogeneous integration packages, according to NIST.

Future Directions For Metrology In Semiconductors

Looking forward, metrology is poised to become even more crucial as the semiconductor industry pushes toward new frontiers. Increasing demands for performance and reliability are driving developments in materials purity, nanoscale dimensional measurement, and real-time process control. Emerging challenges revolve around integrating ever-smaller components, modeling complex systems, and assuring supply chain traceability for materials.

According to Semiecosystem, the CHIPS Metrology Program’s roadmap anticipates advanced metrology for next-generation microelectronics, offering both hardware and software solutions designed to measure and model the multifaceted physical properties of future devices.

The establishment of collaborative data ecosystems such as METIS enables stakeholders to access, share, and build upon research outcomes, catalyzing industrywide innovation. As simulation and modeling tools become more sophisticated, manufacturers will gain the ability to predict outcomes even before fabrication begins. Moreover, writes SMAERT USA, improved metrology will support new manufacturing paradigms such as digital twins, which are virtual representations of physical systems providing feedback and optimization in real-time.

Government investment, including the CHIPS for America initiative and targeted funding opportunities, is accelerating research and development in metrology, supporting small businesses and startups engaged in creating commercially viable solutions. This governmental push, coupled with active partnerships from academia and industry, ensures that measurement science will be ready to meet both today’s and tomorrow’s manufacturing needs.

Metrology, the science of measurement, underpins the ability to manufacture sophisticated semiconductors with extreme precision and reliability. Historically, metrology has driven technological advancement by providing shared standards and tools needed to scale innovations.

In today’s semiconductor industry, it ensures quality, optimizes production, and identifies new pathways for device design and integration. As electronics move toward ever-smaller, faster, and more complex architectures, metrology’s future role will expand to include real-time monitoring, advanced simulations, and new standards that support global competitiveness and innovation.