Brochure | October 11, 2011

High Performance Air Bearing Stage Capabilities & Solutions

Source: Newport Corporation

Newport's reputation for being the premier supplier of high-precision motorized stages is exemplified by our full line of Air Bearing Positioning Systems. Whether you select the DynamYX® Datum™ capable of 5 G acceleration and nanometer accuracy, the evolutionary HybrYX® air and mechanical bearing "hybrid" stage or the newly released SinguLYS® that combined a lot of the advanced features of the previous models into a single axis solution, Newport has the knowledge and expertise needed to address the most complex and demanding motion control applications.

We have in excess of 1000 field deployed tools installed in facilities around the world, many operating in 24/7 environments in the semiconductor industry in wafer inspection and lithography applications, for example. Other applications include flat panel display (FPD) inspection and processing and laser scribing of thin-film photovoltaic panels & various laser scribing applications related to LED manufacturing.

Newport's custom systems serve a comprehensive range of markets

  • Industrial Metrology & Manufacturing
  • Aerospace & Defense
  • Research
  • Semiconductor & Microelectronics
  • Life & Health Sciences
  • Applications

  • Positioning
  • Test
  • Metrology
  • Inspections
  • Manufacturing
  • Advanced Packaging
  • Laser Processing & High Load Actuators Micromachining
  • Newport's motion product offering includes many high precision technologies

  • Linear Stages
  • Rotary Stages
  • Goniometric Stages
  • High load Actuators
  • DC/Stepper/Piezo and Linear Motors
  • Integrated Motion Controller to 8 axis
  • Material Preparation
  • Vacuum Preparation
  • Ceramic Structure (SiC)
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