Excimer Laser Technology: Laser Sources, Optics, Systems and Applications
"Excimer Laser Technology: Laser Sources, Optics, Systems and Applications" communicates the technical fundamentals and possibilities of the excimer laser and relevant optics without going too deeply into theoretical details. By starting at the basics of laser physics and laser-related optics, it provides a simple introduction into the subject. The book includes fundamental descriptions about microlithography, TFT annealing, Fiber Bragg Gratings, micro-fabrication and refractive laser surgery (PRK, PTK and LASIK). This not only illustrates where excimer laser technology is today, but also provides an effective introduction to the most cost-effective excimer laser tools for specific applications.
"Excimer Laser Technology: Laser Sources, Optics, Systems and Applications", takes a close look at the way that excimer-laser-based applications affect our high-tech-dominated daily life: whether it be the manufacturer of highly integrated microchips through excimer laser lithography, the precise drilling of micro-nozzle arrays for ink jet printers, the re-crystallization of TFT/AMLCD flat panel displays through excimer laser annealing, or photo-refractive surgery for vision correction.
The book is not only intended for laser technology students and process application researchers and engineers, but also for anyone interested in understanding why advances in laser technology are consistently beneficial for the development of new products, processes and practices. The bound book contains approximately 300 pages and includes approximately 180 color and black/white photographs, diagrams and tables.
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