Excimer Laser Microprocessing System

The new M8000 is a complete, turnkey system intended for a wide variety of high precision microprocessing tasks based on excimer laser mask projection techniques. Typical applications include MEMS, microfluidic systems, medical device production, patterning of thin films for displays, high speed marking, and PC board interconnect and via drilling.

The system consists of an excimer laser, customized beam shaping and projection optics, high accuracy mask and workpiece translation stages. It is a smart processing station, which makes extensive use of automation and self-diagnostics. This includes beam profiling, auto-alignment, auto-focus, automatic fluence calibration and dose control. The system also provides automated, synchronized scanning of mask and workpiece to enable patterning/machining of large areas. All components are mounted on a rigid granite platform, making the unit insensitive to vibration and temperature fluctuations. The entire system is contained within a Class I enclosure, allowing use in a production environment.

Exitech, 1120 O'Brien Drive, Menlo Park, CA 94025. Tel: 650 327-5759; Fax: 605 327-5808.