News | September 5, 2008

Cymer Unveils New XLR 500d, Enabling High Productivity Dry ArF Lithography

SAN DIEGO--(BUSINESS WIRE)--Cymer, Inc. (Nasdaq:CYMI), the market's leading developer of light sources used to create advanced semiconductor chips, has unveiled the XLR 500d—an argon fluoride (ArF) laser light source for 32 nanometer (nm) dry lithography. Expanding Cymer's market leadership with the adoption of its XLR technology, the XLR 500d offers advanced capabilities developed in the XLR 500i for advanced ArF immersion lithography. The light source's enhanced energy stability enables the use of fewer pulses per exposure, providing chipmakers with increased throughput and an overall reduction in operating costs.

"Over the past year, chipmaker and scanner customers have rapidly adopted Cymer's XLR platform for immersion lithography," said Ed Brown, president and chief operating officer for Cymer. "With the introduction of the new XLR 500d, customers can now have access to all the advantages of our proven XLR platform for dry lithography as well as their advanced ArF immersion applications."

As lithography is deployed into full 32nm production environments, Cymer's XLR 500d will bring the critical advantages of the XLR 500i into the dry ArF market. In addition to its proven Recirculating Ring technology and lower cost of consumables through longer life modules, customer benefits include improved energy and dose stability, better bandwidth stability leading to improved critical dimension (CD) uniformity on the wafer, and a longer interval between gas refills, made possible with Cymer's gas lifetime eXtension (GLX2TM) product – a stand-alone laser upgrade first introduced in November 2007 that extends the time between gas exchanges by a factor of 20.

Initial orders for the XLR 500d have been received and shipments are scheduled for the third and fourth quarter of 2008.

Forward Looking Statements

Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to references to the XLR 500d delivering improved performance and lower cost of operation, and all the other benefits of the XLR series of products; and the benefits of features such as the GLX2 control system. These statements are based only on current information and expectations that are inherently subject to change and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in these statements due to various factors, including but not limited to: the possibility that the XLR 500d and features such as GLX may not perform as, or deliver the cost benefits, expected; new and enhanced product offerings by competitors; the timing of customer orders, shipments and acceptances; the rate at which semiconductor manufacturers take delivery of photolithography tools from the company's customers; delays or cancellations by customers of their orders; cyclicality in the semiconductor equipment industry; the demand for semiconductors in general, and, in particular, for leading-edge devices with smaller geometries; inability by the company to meet its production and/or product development schedules; and inability of the company to secure adequate supplies of critical components for its advanced products. For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company's most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission. You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this press release. All forward-looking statements are qualified in their entirety by this cautionary statement, and the company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this press release.

About Cymer

Cymer, Inc. is the market leader in developing laser light sources, used by nearly every major chipmaker around the world to manufacture advanced semiconductor chips. For more than two decades, Cymer has created light sources that are essential in creating the technology that impacts the way people work, communicate and play each day. Whether one has an iPod, computer, Blackberry or other electronic item, chances are Cymer's light helped create the chip inside. In addition, Cymer is leading the industry in its transition to extreme ultra-violet lithography, the next viable technology needed to manufacture smaller, faster chips. In 2007, Cymer was named one of the "100 Fastest Growing Tech Companies" in the world by CNN Money/Business 2.0. The company was founded and is headquartered in San Diego, Calif. and supports its customers from two dozen offices around the globe. Additional information may be found at

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