Cymer Unveils Extended Lifetime Laser Warranties

Excimer laser manufacturer Cymer Inc. has announced extended lifetime warranties will be offered to Cymer customers for all major components of the company's ELS-5000, EX-5000, and ELS-5010 krypton fluoride (KrF) lasers. The new warranties immediately apply to all existing 5000 Series lasers in the field and to all 5010 Series lasers shipped after November 1, 1998.

In addition, Cymer is offering customers the opportunity to upgrade their existing 5000 Series lasers to a lower cost of operation model 5005 laser through the purchase of upgrade kits. The upgrade allows customers to utilize common spare parts between the 5005 and the 5010 and extends warranties and expected lifetimes on the 5005 to equal those of the 5010. This program is designed to reduce chipmakers' cost of operation by as much as 45%.

With respect to the ELS-5010 lasers shipped after November 1, 1998, chamber expected lifetime will increase from 3 to 5 billion pulses, line narrowing module expected lifetime will increase from 3 to 6 billion pulses and the wavelength stabilization module expected lifetime will increase from 5 to 10 billion pulses.