Article | January 22, 2021

Beam Pen Lithography (BPL) - Desktop Nanoprinting Enabled By Compact 3D Nanopositioning Stage

This article discusses a desktop nanoprinter based on a novel, highly scalable, and versatile photolithographic technology and XYZ piezo-driven nanopositioning stage finds applications in photonics, meta-materials, electronics, soft robotics, and biomedicine.

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