5-Axis Wafer Stage, Air Bearing Motion System

At Photonics West in San Francisco, PI showcased its advanced 5-axis nanopositioning air bearing motion system, designed to provide high-precision motion control across five degrees of freedom: X, Y, Z, Theta-X, and Theta-Y. This cutting-edge technology is particularly suited for semiconductor front-end and back-end processes, including critical operations such as wafer processing and assembly. The system leverages PI’s compact A-311 planar XY-air bearing stage, known for its ultra-low profile and high precision, and the A-523 3-axis Z-Tip-Tilt stage to offer exceptional motion capabilities in multiple directions.

The nanopositioning system is powered by the ACS-based A-826, a 6-axis high-performance industrial motion controller, which ensures accurate and reliable operation in demanding environments. This high level of precision is crucial for semiconductor applications, where even the smallest deviations can impact the quality and yield of the finished products.

With its combination of ultra-low profile, multi-axis control, and high-performance motion capabilities, this system is positioned as a powerful solution for advancing semiconductor manufacturing processes. The ability to perform complex movements with pinpoint accuracy enhances the efficiency and reliability of wafer processing and assembly tasks, making it an ideal choice for high-precision industries such as semiconductor manufacturing.