AL110 Series Wafer Inspection System
Source: Olympus America Inc.
The AL110 Series programmable wafer handlers are cost-effective and versatile, making them the clear choice when a programmable wafer handler is required to improve throughput
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•Brochure: AL110 Wafer Inspection System
The AL110 Series programmable wafer handlers are cost-effective and versatile, making them the clear choice when a programmable wafer handler is required to improve throughput. With a diversity of inspection modes, such as sequential sampling and micro/macro inspection of both front and back surfaces (including the ability to macro inspect the entire back surface of the wafer from 90° to 160°), the AL wafer handling systems are a reliable and efficient choice.
•Brochure: AL110 Wafer Inspection System
•Brochure: AL110 Wafer Inspection System
The AL110 Series programmable wafer handlers are cost-effective and versatile, making them the clear choice when a programmable wafer handler is required to improve throughput. With a diversity of inspection modes, such as sequential sampling and micro/macro inspection of both front and back surfaces (including the ability to macro inspect the entire back surface of the wafer from 90° to 160°), the AL wafer handling systems are a reliable and efficient choice.
A wide array of standard features include MX51/MX61/MX61L/MX80 integration, programmable inspection modes, non-contact wafer alignment, self-diagnostics and a stainless steel body for clean room compatibility.
Features & Benefits
- Multiple formats: Offers one-button switch over from 6" to 8" wafer configurations or between different cassette types.
- Non-contact: Provides non-contact optical wafer centering and notch detection
- High-Throughput: Offers a 20% throughput enhancement compared to AL100
- Class 10 Compatible: Includes stainless steel facade for clean room compatibility
- System Integration: Accommodates integration with a MX50 or MX80 via a manual or motorized shuttle stage for automated wafer inspections
- 100% Backside Inspection: Includes a new second back surface macro feature that permits observations of the entire back surface of the wafer by rotating wafers after the first macro inspection — exposing the obstructions caused by the wafer-retaining tabs
- Custom Cassette Options: Accommodates wafer cassettes with 26 slots or other custom configurations available.
- Simple, Ergonomic Operation: Offers an optional remote control unit for close range fingertip operation
- Wafer Protection: Provides for the registration/display of defective wafers and detects mis-aligned wafers in cassettes
- Ease of Use and Maintenance: Includes self-diagnosis mode with digital error code display for ease of troubleshooting and maintainability
•Brochure: AL110 Wafer Inspection System