Case Study

Advanced Mask Printability Analysis Using TINT Virtual Stepper System

By Darren Taylor, Photronics and Richard D. Eandi, PhD., Zygo

zygo

In this case study, Zygo Advanced Imaging Group's TINT Virtual Stepper Defect Analysis System's ability to predict CD printability of various known features on photomasks is tested. The validation of this tool will help keep both mask makers and wafer makers on schedule. Download the full study to learn more.

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