EUV/DUV Detector Solutions For Lithography and Metrology
Source: Opto Diode, An ITW Company
Opto Diode Corporation is a trusted partner for the semiconductor industry, providing high-quality technologies for DUV and EUV photolithography and metrology applications.
From applications in DUV phase contrast imaging for mass production lithography steppers to extreme ultra violet source monitoring, Opto Diode stands as a pivotal player in the worldwide semiconductor manufacturing landscape. Our world-class UV detectors not only exhibit remarkable stability but also demonstrate superior External Quantum Efficiency (EQE); specifically developed for photon detection with high flux levels like those encountered in synchrotron, excimer lasers, and Z-Pinch technologies.
Why Customers Choose Opto Diode
- Custom detector and emitter solutions across a wide range of wavelengths
- Optimized for design and manufacturing with on-site wafer fabrica􀀍on
- Flexible product customization capabilities and sustainable quality and reliability
- Extensive assembly capacity, packaging expertise and rapid prototype turnarounds
- Industry leading response and stability in the soft X-ray, EUV, and UV range
Opto Diode, An ITW Company
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