Detector Solutions For EUV/DUV Lithography And Metrology

For over 30 years, Opto Diode Corporation has been a trusted partner in the semiconductor industry, with significant titans of industry relying on our technologies to meet their precise needs in DUV and EUV photolithography and metrology applications.

Opto Diode is a prominent player in the semiconductor manufacturing industry, with applications ranging from DUV phase contrast imaging for mass production lithography steppers to extreme ultra violet source monitoring. Our world-class UV detectors showcase exceptional stability and superior External Quantum Efficiency (EQE), making them ideal for photon detection in high flux level environments