Lambda Physik® Introduces Long-Lifetime COMPex® Excimer Laser Series

Goettingen, Germany -- Lambda Physik introduces the new COMPex 100 and 200 UV excimer lasers that deliver enhanced performance in four pivotal areas: longer gas lifetime, improved beam homogeneity, optimized pulse-to-pulse stability, and extended intervals between optics cleaning. The latest COMPex series lasers now offer tens of millions of pulses of hands-free operation at a constant pulse energy, even when operating at 193 nm with argon fluoride. This is the longest gas lifetime for any laser in this class.

These new performance advantages result from two significant engineering improvements: a new internal gas purification system, as well as proprietary smooth ceramic preionization. COMPex's ceramic preionization uniquely combines frictionless and homogeneous volume preionization with the effectiveness required to provide multi-hundred millijoules of output energy.

The COMPex family of excimer lasers features a small footprint, a single-phase power supply and integrated energy stabilization. COMPex lasers deliver stable, homogeneous output with pulse repetition rates up to 100 Hz and pulse energies of up to 600 millijoules for scientific, medical and industrial applications. The COMPex laser is ideally suited for high-energy laser ablation applications, such as PLD (Pulsed Laser Deposition) and LA-ICP-MS (Laser-Assisted Inductively-Coupled Mass Spectrometry).

Lambda Physik is the worldwide technology leader for pulsed UV and tunable laser sources for lithography, industrial, scientific and medical applications.

Source: Lambda Physik