Extreme Ultraviolet (EUV) Photodetector: SXUV5 Datasheet

The SXUV5 photodiode is designed to detect extreme ultraviolet (EUV) radiation. This device is highly responsive to 1-190 nm wavelengths and remains stable over long exposure to high-intensity EUV energy.

The SXUV5 features a circular active area of 2.5 mm diameters and is housed in a windowless, TO-5 package to allow for responsivity at wavelengths shorter than 150 nm. Other features include shunt resistance of 20 MOhms (minimum) and reverse breakdown voltage of 5 Volts (minimum) to 20 Volts (typical). Capacitance is 500 pF (typical) to 1500 pF (maximum), and response time is from 1 nsec (typical) to 2 nsec (maximum).

Storage and operating temperatures range from -10 °C to +40 °C (ambient) and from -20 °C to +80 °C in nitrogen or vacuum environments. The lead soldering temperature is 260 °C.