Directly-Deposited Thin-Film Filter Photodetectors: AXUV100TF030 Datasheet

The AXUV100TF030 is a directly-deposited thin-film filter photodetector featuring 100 mm² square active area for extreme ultraviolet (EUV) detection. The device is designed for use in detecting solar EUV radiation, soft x-ray radiometry, x-ray and EUV lithography, x-ray microscopy and extreme vacuum ultraviolet (XUV) spectroscopy.  The AXUV100TF030 features typical responsivity of 0.16 A/W at 3 nm and has a detection range from 1 nm to 12 nm. For additional information on the thin-film filter photodetectors, download the available datasheet.