UV/EUV Continuous Position Sensor: ODD-SXUV-DLPSD

Source: Opto Diode, An ITW Company

UV/EUV Continuous Position Sensor: ODD-SXUV-DLPSD

The ODD-SXUV-DLPSD continuous position sensor has been optimized for detecting light position in the 1nm to 400nm wavelength range. It’s ideal for advanced lithography and other positioning applications that require the use of a sub 200 nm wavelength.

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This duo-lateral submicron-position resolution sensor comes in a TO-8 windowless package, which ultimately minimizes its responsivity after exposure to UV/EUV photons. It has a 5mm x 5mm active area and features reverse breakdown voltage of a minimum of 50 volts and a capacitance of 40 (typ) to 60 (max) pF.

Contact Opto Diode for more information on the ODD-SXUV-DLPSD position sensor’s specifications or to discuss your sub-micron positioning applications.

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