By Thomas H. Loewe, SCHOTT North America, Inc. Lighting and Imaging
Extreme ultraviolet technology (EUV) represents a groundbreaking technological change in microchip production. Serial production has begun on the ASML EUV wafer scanner family, the “TWINSCAN NXE” series, to be ready for shipment later this year. SCHOTT is ready to standby to provide components and know-how. This article discusses the transformed technology used by the new system, including a fine proton brush to miniaturize the system even further. Download the article for more information.