Application Note

Application Note: Sensing Picogram Masses: Laser Vibrometry Leads To Breakthroughs In MEMS Dynamic Analysis

Source: Polytec

Laser-Doppler Vibrometry (LDV) measurements have been instrumental in the development of resonant microelectromechanical systems (MEMS). In this article, the benefits of LDV for MEMS analysis and measurement are discussed for the specific case of a resonant Mass/Chemical Sensor.