Datasheet | March 23, 2013

Precision XY Scan Stages

Source: PI (Physik Instrumente) LP

This datasheet provides an overview of PI’s line of precision XY scan stages. Six different models are included, all with varying travel ranges, maximum speed, load capacity, clear aperture sizes, uni-directional repeatability, and more. To find out which stage is best suited to help with your application involving surface metrology, topographical measurements in semiconductor test and inspection, flat-panel manufacturing, materials research, optical inspection of precision machined parts and more, download the datasheet.

Uploaded: March 2013