Application Note

Application Note: Measurements On Comb-Drive And Cantilever Structures Using New Hybrid Laser Doppler Vibrometer And Strobe Video System

Source: Polytec
Laser Doppler Vibrometry (LDV) is a widely accepted tool for dynamic characterization of MEMS. Using automated scan capability, the Polytec system can measure structural resonance and display out-of-plane deflection shapes with amplitudes down to the picometer level and frequencies up to 30 MHz.