The Verifire™ MST is a laser interferometer system designed specifically for precise optical metrology of multiple surfaces simultaneously, including plane parallel components with multiple reflections. In classical interferometer applications, the system uses wavelength shifting of phase, and ZYGO’s patented Fourier Transform Phase Shifting Interferometry (FTPSI) to measure up to four-surface cavities.
The Verifire™ MST has the ability to show all of the surfaces, or only the surfaces of interest, within the ZYGO Mx™. The FTSI feature automatically suppresses artifacts, eliminating the need for an extended source. The system measures front surface man, optical thickness variation, and the back surface approximation, and is available in 633 nm, 1.053 µm, and 1.55 µm wavelengths.
For more information on the Verifire MST interferometer system, download the brochure.