Industry's First EUV-Compatible Position Sensing Detector

Source: Opto Diode, An ITW Company

Stan Duda, national sales manager for ITW-Opto Diode, gives us some background on his company, a manufacturer of silicon photodiodes, LEDs, LED arrays, and UV/X-Ray photodetectors, at Photonics West 2013. He then introduces us to the industry’s first EUV-compatible position sensing detector. This detector’s responsivity stability makes it ideal for applications involving UV and EUV sources, as well as EUV scanners and inspection tools.