Products and Services
Piezo Stages
•Spec Sheet: Piezo Stages
•Datasheet: Manual Positioners
- Compact and Modular Design
- X, XY, XYZ, 2Axis Tilt, Rotation Versions Available
- Fine 1nm open-loop resolution; 20nm close-loop resolution
- Unique compact F/D digital close-loop sensor
- Active error compensation for precise linear trajectory control
- Compatible with our existing manual and motorized stage product lines
- Long Travel Range: 90 microns piezo fine drive, 320 microns manual coarse travel
SFS Series Piezo Stages are designed to meet the challenge of nanometer control requirements. Suitable applications are fiber optics assembly fabrication and testing, scanning microscopy, biometric, scanning interferometry, disk drive testing and more.
Our proprietary compact Frequency/Digital conversion sensor has both benefits of high resolution as the resistive sensor and the long detection range of the capacitive sensor. This allows a fine 20nm close-loop resolution and precise linearity control. Compact and modular design allows up to 6 degrees of freedom; X, XY, XYZ, 2 axis tilt and rotation modules can be stacked together to make up the number of control axes needed. In addition, the SFS series Piezo stages can couple with our existing manual and motorized stages and mirror mounts to complete the setup you need with ease.
Mark-503 three-axis stage controller has been developed to optimize the precision of our SFS Piezo stages. This three-axis close/open loop controller incorporates fast electronics to Optimized sampling time to achieve high linearity and resolution. Interfaces include USB, GP-IB and RS232C. Software driver and sample programs are available in LabView and Active X.
Click Here To Download:•Spec Sheet: Piezo Stages
•Datasheet: Manual Positioners
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