Downloads
Application Note: MEMS Micromachining With UV Excimer Lasers
The emergence of MEMS (Micro Electro Mechanical Systems), promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications.
MEMS technology is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.
The content you requested is only available to registered users of Photonics Online. By registering now, you'll get access to this piece of content and thousands of additional articles and product reviews across our entire network of sites.
