White Paper: A High Rate Reactive Sputtering Process For Batch, In-Line, Or Roll Coaters

N. Boling, B. Wood and P. Morand, Deposition Sciences Inc., Santa Rosa, CA

DC and so-called quasi dc reactive sputtering of dielectrics have advanced rapidly during the past several years. Keys to much of the advance have been active feedback control of partial pressure, new arc suppression systems, and use of auxiliary plasmas to increase deposition rates. In this paper we describe a high rate system, MicroDyn®, incorporating all of these features.