Optical Profiling Of High Slope Surfaces

Optical profilers using Coherence Scanning Interferometry (CSI) have traditionally found it a challenge to measure highly sloped surfaces. Surfaces like these can be found in all industries and can include optical micro-lenses, brightness enhancing structures, and machined cones. ZYGO offers CSI based profilers running Mx™ software with advancements in signal detection and processing that vastly improve the ability to obtain valid topography data from surfaces with high slopes. Download the application note to learn about the measurement techniques and algorithmic advancements in ZYGO’s CSI based profilers running Mx™ software.