Microlens Arrays For Laser Micro Materials Processing And Laser Illumination

In addition to the homogenizer arrays with a lens aperture of 1.3 mm LIMO also offers new standard arrays with 0.8 mm and 0.5 mm lenses. The microlens arrays are made of synthetic fused silica and can be used from UV to IR. These lenses were designed especially for compact and cost effective systems that use small laser beam diameters. Optimized for high power industrial applications, all microlens-arrays from LIMO have an unique surface polish quality for lowest scattering loss and highest optical resistance.

The optics can be used for direct materials processing and mask based micro material processing as well. An even and reliable surface structuring of e.g. silicon wafer, displays and solar cells becomes possible. For surface inspection and quality insurance, the laser illumination systems including LIMO microlens arrays, increase the process resolution and speed due to precise intensity and angular distribution of the laser light on the object.