13.5 nm Directly-Deposited Thin-Film Filter Photodetectors: SXUV100TF135 Datasheet

The new SXUV100TF135 13.5 nm is a directly-deposited thin-film filter photodetectors ideal for electrical performance in many applications, including laser power monitoring, semiconductor photolithography, and metrology systems that utilize extreme ultraviolet light. The SXUV100TF135 is optimized for higher speed reverse bias voltage operation, and features low capacitance at 260 pF with a reverse bias voltage of 12 V. It offers excellent stability and robust design for use in extreme ultraviolet environments. For additional information on the thin-film filter photodetectors, download the available datasheet.